Professor, Doctor's Supervisor
Room: Phys. Dep 305
E-mail: yrzhang@
Yu-Ru Zhang was born in Hebei Province, China, in 1987. She did her PhD at Dalian University of Technology since 2009, but in a double doctorate with University of Antwerp. After she graduated, she got a position as a lecturer in DUT. Besides, she worked in the group PLASMANT, University of Antwerp as a postdoc for 1.5 years. She is experienced in modeling plasma chemistry and plasma physics.
Work Experience
Lecturer, Master's Supervisor
Dalian University of Technology, China (Jan. 2014 – present)
Post doctor
University of Antwerp, Belgium (Mar. 2015 – Aug. 2016)
Education
Double Doctorate
University of Antwerp, Belgium (Apr. 2013 – Dec. 2013)
Major in Chemistry
Supervisor: Prof. Annemie Bogaerts
Ph. D
Dalian University of Technology, China (Sep. 2009 – Dec. 2013)
Major in Plasma Physics
Supervisor: Prof. You-Nian Wang
B. S.
Dalian University of Technology, China (Sep. 2005 – Jul. 2009)
Major in Optical Information Science and Technology
Thesis Supervisor: Prof. You-Nian Wang
Publications
1. Y. R. Zhang, K. Van Laer, E. C. Neyts and A. Bogaerts, Can plasma be formed in catalyst pores? A modeling investigation, Appl. Catal. B Environ., 185, 56-67 (2016).
2. Y. R. Zhang, F. Gao, X. C. Li, A. Bogaerts and Y. N. Wang, Fluid simulation of the bias effect in inductive/capacitive discharges, J. Vac. Sci. Technol. A, 33, 061303 (2015).
3. Y. R. Zhang, S. Tinck, P. De Schepper, Y. N. Wang and A. Bogaerts, Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime, J. Vac. Sci. Technol. A, 33, 021310 (2015).
4. Y. R. Zhang, A. Bogaerts and Y. N. Wang, Fluid Simulation of the Phase-shift Effect in Ar/CF4 capacitively coupled plasmas, J. Phys. D: Appl. Phys., 45, 485204 (2012).
5. Y. R. Zhang, X. Xu, A. Bogaerts and Y. N. Wang, Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: I. Transient behaviour of electrodynamics and power deposition, J. Phys. D: Appl. Phys., 45, 015202 (2012).
6. Y. R. Zhang, X. Xu, A. Bogaerts and Y. N. Wang, Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: II. Radial uniformity of the plasma characteristics, J. Phys. D: Appl. Phys., 45, 015203 (2012).
7. Y. R. Zhang, X. Xu, S. X. Zhao, A. Bogaerts and Y. N. Wang, Comparison of electrostatic and electromagnetic simulations for very high frequency plasmas, Phys. Plasmas, 17, 113512 (2010).
8. Y. R. Zhang, X. Xu and Y. N. Wang, Fluid simulation for influence of metastable atoms on the characteristics of capacitively coupled argon plasmas, Phys. Plasmas, 17, 033507 (2010).
9. S. X. Zhao, Y. R. Zhang, F. Gao, Y. N. Wang and A. Bogaerts, Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study, J. Appl. Phys., 117, 243303 (2015).
10. Y. X. Liu, Y. R. Zhang, A. Bogaerts and Y. N. Wang, Electromagnetic effects in high-frequency large-area capacitive discharges: A review, J. Vac. Sci. Technol. A, 33, 020801 (2015).
11. X. Y. Sun, Y. R. Zhang, X. C. Li and Y. N. Wang, Modulations of the plasma uniformity by low frequency sources in a large-area dual frequency inductively coupled plasma based on fluid simulations, Phys. Plasmas, 22, 053508 (2015).
12. H. J. Xu, S. X. Zhao, Y. R. Zhang, F. Gao, X. C. Li and Y. N. Wang, Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas, Phys. Plasmas, 22, 043508 (2015).
13. Y. S. Liang, Y. X. Liu, Y. R. Zhang and Y. N. Wang, Fluid simulation and experimental validation of plasma radial uniformity in 60 MHz capacitively coupled nitrogen discharges, J. Appl. Phys., 117, 083301 (2015).
14. Y. H. Wang, W. Liu, Y. R. Zhang and Y. N. Wang, Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment, Chin. Phys. B, 24, 095203 (2015).
15. H. J. Xu, S. X. Zhao, F. Gao, Y. R. Zhang, X. C. Li and Y. N. Wang, Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model, Chin. Phys. B, 24, 115201 (2015).
16. F. Gao, Y. R. Zhang, S. X. Zhao and Y. N. Wang, Experimental and numerical investigations of the phase-shift effect in capacitively coupled discharges, Phys. Plasmas, 21, 083507 (2014).
17. F. Gao, Y. R. Zhang, S. X. Zhao, X. C. Li and Y. N. Wang, Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias, Chin. Phys. B, 23, 115202 (2014).
18. F. Gao, W. Liu, S. X. Zhao, Y. R. Zhang and Y. N. Wang, Changes of the electron dynamics in hydrogen inductively coupled plasma, Chin. Phys. B, 22, 115205 (2013).
19. Z. H. Bi, Z. L. Dai, Y. R. Zhang, D. P. Liu and Y. N. Wang, Effects of reactor geometry and frequency coupling on dual-frequency capacitively coupled plasmas, Plasma Sources Sci. Technol., 22, 055007 (2013).
20. X. Xu, S. X. Zhao, Y. R. Zhang and Y. N. Wang, Phase-shift effect in capacitively coupled plasmas with two radio frequency or very high frequency sources, J. Appl. Phys., 108, 043308 (2010).
