● MAPS
The microfabrication of integrated circuits (ICs) in the microelectronics industry is based on hundreds of fabrication steps. About one-third of these steps are based on surface modification by gas discharge plasmas. Because of the important use of gas discharge plasmas in the microelectronics industry, a good insight in the plasma behavior is desirable. Under the support of the Important National Science and Technology Specific Project "Simulation of multi-fields in plasmas used in the microelectronic industry", the so-called Multiphysics Analysis for Plasma Sources (MAPS) with independent intellectual property rights has been developed, which could be used to investigate the plasma behavior under various conditions.
Within this project, two types of gas discharge plasmas can be studied, i.e., inductively coupled plasmas (ICPs) and capacitively coupled plasmas (CCPs), which have been widely used in the plasma etching, plasma enhanced chemical vapor deposition (PECVD), and physical vapor deposition (PVD). MAPS is a comprehensive modeling platform, which consists of a series of modules, and these modules are iterated to reach a converged solution. For instance, before we start the simulation, the discharge parameters and the reactor geometry should be defined in the input module. In the chemistry module, we provide the reaction data for various species and reactions. In the plasma module, which forms the core of MAPS, the plasma behavior is described. Electromagnetic fields, which also plays an important role in discharges, are obtained by solving Maxwell equations or Poisson equation in the Electromagnetic module.
In order to validate the simulation result, experimental measurements by utilizing various diagnostic tools have been carried out. By comparing the numerical and experimental results, a good agreement has been achieved. Based on the experimental data, MAPS has been improved for performing more accurate simulations.
Moreover, MAPS has been employed by some IC equipment manufacturing enterprises, for instance, North Microelectronics and Shenyang Piotech Co., Ltd. According to their requirements, the influence of the reactor geometry, the material properties, as well as the discharge parameters, on the plasma characteristics have been investigated. The results could help us improve and design new equipments with reduced operation period and cost.
MAPS is the first Multiphysics software in china for the study of plasma etching, plasma enhanced chemical vapor deposition (PECVD), and physical vapor deposition (PVD). MAPS is meaningful to Chinese semiconductor industry，although it is far from perfect.
● Blade server
PSEG group has two blade servers. Parameters are as follow:
Server 1st：
name |
Brand |
Model |
Parameters |
Amount |
Cabinet |
Dell |
PowerEdge M1000e |
Dell PowerEdge M1000e，10U case,external DVD-ROM drive, Redundant power supply (6x2360W) |
1 |
Blade server |
Dell |
PowerEdge M610 |
Dual-Xeon E5630 2.53 GHz，12 MB cache，5.86 GT/s QPI，Turbo，HT，4C /24GB RAM (6x4GB) /146GB 10K RPM,6Gbps SAS 2.5 inches hot plug disk |
16 |
Management node |
Dell |
PowerEdge R410 |
Dual-Xeon E5630 2.53 GHz，12 MB cache，5.86 GT/s QPI，Turbo，HT，4C /24GB RAM (6x4GB) / 600GB 3.5 inch 15K RPM 6Gbps SAS hot plug disk /DVDROM/slide |
1 |
Storage node |
Dell |
PowerVault MD1000 |
3U，SAS & SATA II, 10*600GB 3.5" 15K RPM, 6Gbps SAS disk |
1 |
Monitor |
Dell |
E170S |
17 inches |
1 |
Switch |
Dell |
PowerConnect M6220 |
Gigabit Ethernet switch - redundant |
2 |
UPS |
山特 |
山特3KS |
Reserve online power supply |
1 |
Server 2nd：
name |
Brand |
Model |
Parameters |
Amount |
Blade server |
Dell |
PowerEdge M620 |
Dual-Xeon E5-2620 (2.00GHz, 15M cache, 7.2GT/s QPI, Turbo, 6 cores, 95W) /24GB RAM (6x4GB), /300GB 10K RPM - SCSI 6Gbps 2.5 inches hot plug disk /Broadcom 5719 4-port 1GBE Mezz / Broadcom 57810-k dual-port 10Gb KR Blade network card |
16 |
Switch |
Dell |
PowerConnect M6348 |
48 ports Gigabit Ethernet switch |
2 |
Management node |
Dell |
PowerEdge R620 |
Dual-Xeon E5-2630 (2.30GHz, 15M cache, 7.2GT/s QPI, Turbo, 6C, 95W) /24GB RAM (6x4GB), /600GB 2.5 inches 10K RPM 6Gbps SAS hot plug disk /Broadcom 5720 DP 1GBNetwork interface card /DVD ROM, SATA, internal/two, hot plug, redundant power supply (1+1), 750W/slide |
1 |
Storage node |
Dell |
PowerVault MD1200 |
10×600GB 3.5" 15K RPM, 6Gbps SAS disk/ redundant power supply /high speed slide |
1 |
UPS |
|
|
15K Reserve online power supply,30 minutes |
1 |
Environment |
|
|
Linux，Job scheduling management software、Cluster management software; supplied compliers：Intel ifort，Intel c++，gcc，gfortran，f77,pfg90 supported；MATLAB supported；parallel environment：mpich，mpich2，openmpi；math libaries：blas，goto，lapack，fftw，scalapack |
1 |
