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Plasma Simulation and Experiment Group

2016-09-15  点击:[]


All members (September 2014)


PSEG is one of the contingents attached to School of Physics and Optoelectronic Technology, Dalian University of Technology (DUT), composed of a team of top-notch researchers including 4 professors, 3 associate professors, 3 assistant professors, and more than 30 graduate students.

PSEG began its research on low-pressure rf plasmas in 2000, when the group’s research interest was the computer simulation of the low-pressure rf plasmas by using fluid model. Several years later, a particle-in-cell coupled with Monte Carlo collision model (PIC/MCC) was developed and proved to be a very effective tool in simulating low-pressure capacitive discharges. In 2007, an ICP and a CCP experiment reactors were built up, and the matched plasma diagnostics were developed. Currently, our diagnostic tools include two Langmuir probes (Hiden and impedan), a complete-floating double probe (self-made), a resonance Hairpin probe (self-made), an  energy-resolution quadrupole mass spectrometer (Hiden), a retarding field energy analyzer (Impedan), an optical probe, two ICCD cameras with imaging spectrometer (Andor and Princeton), an I-V probe (Impedan), an network analyzer, etc. Under the joint efforts of all members, we have developed the “MAPS” program, composed of fluid model, PIC/MCC model and global model. We have also received 4 software copyrights.

Currently, our research interests are primarily focused on the experimental and simulation study of capacitively and inductively coupled plasmas used in semiconductor processing, including electromagnetic effects in very high frequency CCP, fundamental heating mechanism in CCP, discharge characteristics in pulsed ICP and CCP, basic physics of low-pressure rf plasma, formation mechanism and characteristics of ULSI low-k CNx films, hydrogen plasma induced crystallization of Si thin films, etc. In these fields, several projects are financially supported by National Science Foundation of China, Important National Science and Technology Specific Project, International Science & Technology Cooperation Program of China, etc.

Over the past few years, we have established far-reaching cooperation programs with the domestic institutes and corporations, such as Harbin institute of technology,      Chinaacademy of engineering physics, Shenyang Piotech Co., Ltd., North microelectronics Co., Ltd., and Ideal energy equipment Co., Ltd., and international universities, such as University of Antwerp, Belgium and Ruhr-University Bochum Germany.