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2013 Publications

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2016-09-27 胡艳婷 点击:[]

 

[235] Jia Liu, Quan-Zhi Zhang, Yong-Xin Liu, Fei Gao, and You-Nian Wang, Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O2 discharges, J. Phys. D: Appl. Phys., 46, 235202(2013)

    [235]LJ_JPD_2013.pdf 

 

[234] Wei Liu, Fei Gao, Shu-Xia Zhao, Xue-Chun Li, and Y. N. WangMode transition in CF4 + Ar inductively coupled plasma, Phys. Plasmas, 20, 123513(2013)

      [234]LW_POP_2013.pdf

 

[233] Jia Liu, De-Qi Wen, Yong-Xin Liu, Fei Gao, Wen-Qi Lu, and You-Nian Wang, Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges, J. Vac. Sci. Technol. A, 31, 061308(2013)

      [233]LJ_JVSTA_2013.pdf

 

[232] C. Z. Li, Z. L. Miskovic, F. O. Goodman, and You-Nian Wang, Plasmon excitations in C60 by fast charged particle beams, J. Appl. Phys., 113, 184301(2013)

      [232]LCZ_APL_2013.pdf 

 

[231] Zhang-Hu Hu and You-Nian Wang, Electron self-injection in the proton-driven-plasma-wakefield acceleration, Phys. Plasmas, 20, 123109(2013)

      [231]HZH_POP_2013.pdf 

 

[230] Fei Gao, Wei Liu, Shu-Xia Zhao, Yu-Ru Zhang, Chang-Sen Sun, and You-Nian Wang, Changes of the electron dynamics in hydrogen inductively coupled plasma, Chin. Phys. B, 22, 115205(2013)

      [230]GF_CPB_2013.pdf

 

[229] Zhen-Hua Bi, Zhong-Ling Dai, Yu-Ru Zhang, Dong-Ping Liu and You-Nian Wang, Effects of reactor geometry and frequency coupling on dual-frequency capacitively coupled plasmas, Plasma Sources Sci. Technol., 22, 055007(2013)

      [229]BZH._PSST_2013.pdf

 

[228] Ya Zhang, Yuan-Hong Song, and You-Nian Wang, Simulations of interactions of high-energy proton beam with high dense matter based on two-dimensional quantum hydrodynamic model, Laser Part. Beams, 31, 345(2013)

      [228]ZT_LPB_2013.PDF

 

[227] Yong-Quan Du, Wen-Yao Liu, Ai-Min Zhu, Xiao-Song Li, Tian-Liang Zhao, Yong-Xin Liu, Fei Gao, Yong Xu, and You-Nian Wang, Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma, Acta Phys. Sin., 62, 205208(2013)

      [227]DYQ_APS_2013.pdf 

 

[226] Wen-Yao Liu, Yong-Quan Du, Yong-Xin Liu, Jia Liu, T.ian-Liang Zhao, Yong Xu, Xiao-Song Li, Ai- Min Zhu, and You-Nian Wang, Spectroscopy diagnostic of dual-frequency capacitively coupled CHF3/Ar plasma, Phys. Plasmas, 20, 113501(2013)

      [226]LWY_POP_2013.pdf

 

[225] Ying-Ying Zhang, Dan Zhao, Shu-Yan You, Yuan-Hong Song, and You-Nian Wang, Wake Effects in Ion Transport through Carbon Nanotubes, CHIN. PHYS. LETT., 30, 096103(2013)

      [225]ZYY_CPL_2013.pdf

 

[224] Quan-Zhi Zhang, Yong-Xin Liu, Wei Jiang, A. Bogaerts and You-Nian Wang, Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas, Plasma Sources Sci. Technol., 22, 025014(2013)

      [224]ZQZ_PSST_2013.pdf 

 

[223] Yong-Xin Liu, Quan-Zhi Zhang, Jia Liu, Yuan-Hong Song, A. Bogaerts and You-Nian Wang, Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges, Plasma Sources Sci. Technol., 22, 025012 (2013)

      [223]LYX_PSST_2013.pdf

 

[222] Shu- Xia Zhao, Fei Gao, You-Nian Wang, and A. Bogaerts, Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plasma, Plasma Sources Sci. Technol., 22, 015017 (2013)

      [222]ZSX_PSST_2013.pdf

 

[221] Z hang-Hu Hu, Yuan-Hong Song, Yong-Tao Zhao and You-Nian Wang, Modulation of continuous ion beams with low drift velocity by induced wakefield in background plasmas, Laser Part. Beams, 31, 135 (2013)

      [221]HZH_LPB_2013.pdf

 

[220] Xiang- Xu, Jie Feng, Xiang-Mei Liu, You-Nian Wang and Jia Yan, Study of the neutral gas flow on discharges of capacitively coupled plasma in a PECVD reactor, Vacuum, 92, 1 (2013)

      [220]XuX_Vacuum_2013.pdf

 

[219] Zhong-Ling Dai, Sai-Qian Zhang and You-Nian Wang, Study on feature profile evolution for chlorine etching of silicon in an RF biased sheath, Vacuum, 89, 197 (2013)

      [219]DZL_Vacuum_2013.pdf

 

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