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2011 Publications

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2016-09-27 刘建凯 点击:[]

[203] Xue-Chun Li, Huan Wang, Zhen-Feng Ding, You-Nian Wang, Simulation of a pulse-modulated radio-frequency atmospheric pressure glow discharge, Thin solid films 519.20 (2011): 6928-6930.

      [203]LXC-TSF-2011.pdf

 

[202] Xiang-Mei, Liu, Yuan-Hong Song, and You-Nian Wang, Driving frequency effects on the mode transition in capacitively coupled argon discharges, Chinese Physics B 20.6 (2011): 065205.

      [202]LXM-CPB-2011.pdf

 

[201] Xiang Xu, Jie Feng, Xiang-Mei Liu, You-Nian Wang, Study of the dust removal efficiency in capacitively coupled plasmas with annular electrodes, Current Applied Physics 11.5 (2011): S131-S134.

      [201]XX-CAP-2011.pdf

 

[200] Zhen-Hua Bi, Yong-Xin Liu, Wei Jiang, Xiang Xu, You-Nian Wang, A brief review of dual-frequency capacitively coupled discharges, Current Applied Physics 11.5 (2011): S2-S8.

      [200]BZH-CAP-2011.pdf

 

[199] Quan-Zhi Zhang, Wei Jiang, Lu-Jing Hou and You-Nian Wang, Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge, Journal of Applied Physics 109.1 (2011): 013308.

      [199]ZQZ-JAP-2011.pdf

 

[198] Ming Mao, You-Nian Wang, and A. Bogaerts, Numerical study of the plasma chemistry in inductively coupled SF6 and SF6/Ar plasmas used for deep silicon etching applications, Journal of Physics D: Applied Physics 44.43 (2011): 435202.

      [198]MM-JPDAP-2011.pdf

 

[197] E Schüngel, Quan-Zhi Zhang, S Iwashita, J Schulze, Lu-Jing Hou, You-Nian Wang and U Czarnetzki, Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect, Journal of Physics D: Applied Physics 44.28 (2011): 285205.

      [197]Schüngel, E.-JPDAP-2011.pdf

 

[196] Xiang-Zhan Jiang, Yong-Xin Liu, Shuo Yang, Wen-Qi Lu, Zhen-Hua Bi, Xiao-Song Li and You-Nian Wang, Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique, Journal of Vacuum Science & Technology A 29.1 (2011): 011006.

 

 

[195] Zhang-Hu Hu, Yuan-Hong Song, Z.L. Mišković and You-Nian Wang, Energy dissipation of ion beam in two-component plasma in the presence of laser irradiation, Laser and Particle Beams 29.03 (2011): 299-304.

      [195]HZH-LPB-2011.pdf

 

[194] Xiao-Song Li, Nan Wang, Jin-Hua Yang, You-Nian Wang and Ai-Min Zhu, Polysilicon Prepared from SiCl4 by Atmospheric-Pressure Non-Thermal Plasma, Plasma Science and Technology 13.5 (2011): 567.

      [194]LXS-PST-2011.pdf

 

[193] Hong Zhang, Zhong-Ling Dai, and You-Nian Wang, Characteristics of a Collisional Sheath Biased by a Dual Frequency Source, Plasma Science and Technology 13.5 (2011): 513.

      [193]ZH-PST-2011.pdf

 

[192] Zhen-Hua Bi, Xiang Xu, Yong-Xin Liu, Xiang-Zhan Jiang, Wen-Qi Lu and You-Nian Wang, Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon Plasmas, Plasma Science and Technology 13.2 (2011): 181.

      [192]BZH-PST-2011.pdf

 

[191] Guo-Li Zhao, Yong Xu, Jian-Ping Shang, Wen-Yao Liu, Ai-Min Zhu and You-Nian Wang, Plasma Uniformity in a Dual Frequency Capacitively Coupled Plasma Reactor Measured by Optical Emission Spectroscopy, Plasma Science and Technology 13.1 (2011): 61.

      [191]ZGL-PST-2011.pdf

 

[190] Zhong-Ling Dai, Mei-Lan Hao, and You-Nian Wang, Study of Characteristics of the Radio-Frequency Sheath over a Substrate with a Circular Trench, Plasma Science and Technology 13.1 (2011): 50.

      [190]DZL-PST-2011.pdf

 

[189] Wei Jiang, Hong-Yu Wang, Zhen-Hua Bi and You-Nian Wang, Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry: II. Self-bias voltage effects in capacitively coupled plasmas, Plasma Sources Science and Technology20.3 (2011): 035013.

      [189]JW-PSST-2011.pdf

 

 

[188] Ya Zhang, Yuan-Hong Song and You-Nian Wang, Nonlinear wake potential and stopping power for charged particles interacting with a one-dimensional electron gas, Physics of Plasmas (1994-present) 18.11 (2011): 112705.

      [188]ZY-POP-2011.pdf

 

[187] Xiang-Mei Liu, Yuan-Hong Song, Xiang Xu and You-Nian Wang, Phase-shift effects on growth and transport of dust particles in VHF capacitively coupled silane discharges: Two dimensional fluid simulation, Physics of Plasmas (1994-present) 18.8 (2011): 083508.

      [187]LXM-POP-2011.pdf

 

[186] Ya Zhang, Yuan-Hong Song and You-Nian Wang, Stopping power for a charged particle moving through three-dimensional nonideal finite-temperature electron gases, Physics of Plasmas (1994-present) 18.7 (2011): 072701.

      [186]ZY-POP-2011.pdf

 

[185] Xue-Jiao Si, Shu-Xia Zhao, Xiang Xu, A. Bogaerts and You-Nian Wang, Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma, Physics of Plasmas (1994-present) 18.3 (2011): 033504.

      [185]SXJ-POP-2011.pdf

 

[184] Yong-Xin Liu, Quan-Zhi Zhang, Wei Jiang, Lu-Jing Hou, Xiang-Zhan Jiang, Wen-Qi Lu, and You-Nian Wang, Collisionless bounce resonance heating in dual-frequency capacitively coupled plasmas, Physical review letters 107.5 (2011): 055002.

      [184]LYX-PRL-2011.pdf

 

[183] Xiang-Mei Liu, Yan Wang, Yuan-Hong Song, , You-Nian Wang, Effect of pulse duration on characteristics of modulated radio-frequency SiH 4/N 2/NH 3 discharges, Thin Solid Films 519.20 (2011): 6951-6954.

      [183]LXM-TSF-2011.pdf

 

 

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