戴忠玲 教授
房间: 物理系楼303室
E-mail: daizhl@
传 真: 0411-84709304
戴 忠 玲 教授
女，1964年出生，教授。1989年获吉林大学硕士学位，2004年获大连理工大学博士学位，1989年大连理工大学任教，2002年晋升副教授。主持完成国家自然科学基金项目一项，参加国家自然科学基金重点项目、国家自然科学基金联合资助项目和教育部“跨世纪优秀人才培养计划”基金项目等多项工作。在《Physical Review E 》、《Journal of Applied Physics》和《Physics of Plasmas》等刊物上发表论文近20篇。
主要研究方向为：
低气压放电等离子体物理
等离子体鞘层物理特性
等离子体刻蚀机理
文章发表：
1.Z. L. Dai，X Xu and Y. N. Wang, A self-consistent hybrid model of dual frequency sheath: ion energy and angular distributions, PHYSICS OF PLASMAS. 14, 013547 (2007).
2. Xiang Xu, Shuai Wang, Zhongling Dai, Younian Wang， Influence of the low-frequency source parameters on the plasma characteristics in a dual frequency capacitively coupled plasma reactor: Two dimensional simulations， Progress in Natural Science，10-MAR-2009
3. Zhen-Hua Bi, Zhong-Ling Dai, Xiang Xu, Zhi-Cheng Li, and You-Nian Wang， Numerical results for the Ar and CF4 mixture gas in dual frequency capacitively coupled plasma using a hybrid model， Physics of Plasmas （2009）
4. Dai Zhong-Ling, Liu Chuan-Sheng, Wang You-Nian, Two-dimensional Simulation of a Dual Frequency Sheath near an Electrode with a Cylindrical Hole, PLASMA SCIENCE & TECHNOLOGY, （2009）
5. Jiang, Wei, Xu, Xiang, Dai, Zhong-Ling , Wang, You-Nian, Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources, Physics of Plasmas, 15(3), 033502-1, (2008).
6. Liu, Yu , Dai, Zhong-Ling, Wang, You-Nian, Dust particle properties in a dual-frequency driven sheath, CHIN.PHYS.LETT., 25(4), 1372 ( 2008).
7.Mao M , Wang S , Dai Z L and Wang Y N, RF electric field penetration and power deposition into nonequilibrium planar-type inductively coupled plasmas, CHINESE PHYSICS 16,2044 ( 2007)
8. Mao M , Dai Z L and Wang Y N, Two-dimensional self-consistent kinetic model for solenoidal inductively coupled plasma , PLASMA SCIENCE & TECHNOLOGY 9 (1): 30-34 FEB 2007
9.Z. L. Dai, C. S. Liu and Y. N. Wang, Comparison between Dual Radio Frequency- and Pulse-Driven Sheath near Insulating Substrates, CHIN.PHYS.LETT. 25, 632 (2008) .
10. Zhen-Qun Guan, Zhong-Ling Dai , and You-Nian Wang, Simulations of dual rf-biased sheaths and ion energy distributions arriving at a dual rf-biased electrode, PHYSICS OF PLASMAS 12, 123502 (2005).
11. WANG Li-Hong , DAI Zhong-Ling , and WANG You-Nian, Investigation of dual radio-frequency driven sheaths and ion energy distributions bombarding an insulating substrate, CHIN.PHYS.LETT. 23, 668 (2006).
12. DAI Zhong-ling, WANG You-nian, Characteristics of single and dual radio-frequency (RF) plasma sheaths, Front. Phys. China 2, 178−185 (2006).
13. 戴忠玲, 毛明, 王友年. 等离子体刻蚀工艺的物理基础. 物理. 35, 693（2006）.
14.Z. L. Dai and Y. N. Wang, Simulations of ion transport in a collisional radio-frequency plasma sheath, Phys. Rev. E 69, 036403 (2004).
15.Z. L. Dai , Y. N. Wang and T. C. Ma, Spatio-temporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrodes, Phys. Rev. E 65, 036403 (2002).
16. Z. L. Dai and Y. N. Wang, Multiple ion dynamics model for the collisionless rf sheaths and the ion energy distributions at rf-biased electrodes in fluorocarbon plasmas, Phys. Rev. E 66, 026413 (2002).
17. Z. L. Dai and Y. N. Wang, Dynamic Sheath Model at Pulsed-Biased Insulating Substrates , J. Appl. Phys. 92, 6428 (2002).
18. Z. L. Dai and Y. N. Wang, Comparison between characteristics of radio-frequency sheaths and pulse sheaths with insulating substrates, Surf. Coat. Technol. 165, 224 (2003).
19. 戴忠玲,王友年,马腾才, 射频等离子体鞘层动力学模型, 物理学报 50 ,2398(2001).
